Microelectronics Engineering Group

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Electronics Technology, Systems and Automation Engineering Department University of Cantabria
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Title:Fault Injection in an Implantable MEMS-Based Pressure Sensing Device
Type:International Conference
Where:Proceedings of 28th Design of Circuitos and Integrated Systems Conference DCIS 2013
Date:2013-11
Authors: Jose Angel Miguel
Yolanda Lechuga
Román Mozuelos
Mar Martínez
R&D Lines:
Projects:
ISBN:978-84-8081-401-
PDF File:
Abstract:This work explores the fault injection problem in the
particular case of an implantable capacitive microelectromechanical
pressure sensor for blood-flow measurement
to detect in-stent restenosis. In order to develop a Design-for-Test
method for this MEMS-based sensor and its related electronic
circuitry, an accurate and realistic fault model is essential. A
behavioral description of the equivalent capacitance in the faultfree
case can be obtained from the analytical and numerical
solutions of the deflection of a circular or rectangular diaphragm
under uniform pressure. However, the deflection problem for
faulty conditions due to, for example, contamination-based
defects that cause pyramidal crystals to grow on top of the
membrane must be solved and modeled using finite-element
analysis.
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