Microelectronics Engineering Group

Microelectronics Engineering Group

Electronics Technology, Systems and Automation Engineering Department University of Cantabria
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Title:CMD, AN AUTOMATED DESIGN TOOL FOR BLOOD PRESSURE SENSING CAPACITIVE MEMS
Type:International Conference
Where:Proceedings of the 26th micromechanics and microsystems Europe Workshop
Date:2015-09
Authors: David Rivas
Jose Angel Miguel
Yolanda Lechuga
Miguel Angel Allende
Mar Martínez
R&D Lines: Test methods of digital and mixed integrated circuits
Projects: Extensión de la actividad útil de los stent cardiovasculares inteligentes...
ISBN:
PDF File:
Abstract:Implantable biomedical devices may comprise MEMS-type sensors used to acquire physiological signals, as well as CMOS electronics to perform powering, signal conditioning and data transmission. This work targets the development of a new capaci-tive MEMS pressure sensor modeling tool, to provide an initial sensor design based on a set of user-specified input constraints. This tool generates two output folders with all the files required to perform an electromechanical analysis of the sensor, as well as to create a layout cell ready to be included in a larger design.
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