| Full record |
|Title:||Fault Modeling of Implantable MEMS sensors|
|Where:||Proceedings of the International Conference on Biomedical Electronics and Devices. BIODEVICES 2015|
Jose Angel Miguel
Jose R. Berrazueta
Test methods of digital and mixed integrated circuits
Extensión de la actividad útil de los stent cardiovasculares inteligentes...
|Abstract:||The aim of this work is to analyse the fault-injection problem of implantable capacitive micro-electro-mechanical pressure sensors intended to be used as a part of smart stents for in-stent restenosis monitoring. The development of accurate fault models is mandatory in order to create a Design-for-Test methodology compatible with MEMS-based sensors as well as with its related CMOS electronic circuitry. Rigorous behavioural descriptions of both circular and square-shaped fault-free pressure sensors can be obtained from analytical expressions and numerical approximations. However, the deflection vs. pressure response of faulty sensors, suffering from contamination-based defects growth during the fabrication process, require the use of finite-elements analysis to be modelled, allowing the fulfilment of a realistic fault model library.|